Accession Number:

ADA326157

Title:

Micromachined Shear Sensors for Fluid Flows.

Descriptive Note:

Final technical rept. 1 Jun 93-31 Mar 97,

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF ELECTRICAL ENGINEERING AND COMPU TER SCIENCE

Personal Author(s):

• Breuer, Kenneth S.
• Schmidt, Martin A.

Report Date:

1997-05-15

Pagination or Media Count:

102.0

Abstract:

The three year program focused on modeling of fluid mechanics in micromachined systems. The program supported a graduate student at MIT Ed Piekos. The program was successful in exploring the effects of rarefaction and the use of different computational tools for analyzing and simulating flows in MEMS devices.

Descriptors:

• *COMPUTATIONAL FLUID DYNAMICS
• *FLOW VISUALIZATION
• *MICROMECHANICS
• COMPUTERIZED SIMULATION
• OPTIMIZATION
• COMPUTER AIDED DESIGN
• MONTE CARLO METHOD
• MICROELECTRONICS
• SUPERSONIC FLOW
• CHANNEL FLOW
• PRESSURE DISTRIBUTION
• SUPERSONIC NOZZLES
• SHEAR FLOW
• RAREFIED GAS DYNAMICS
• RAREFACTION

Subject Categories:

• Fluid Mechanics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE