Nanometer-Scale Thermal Processing for Advanced Manufacturing (YIP'96)
Annual rept. no. 1, 1 May 96-30 Apr 1997
STANFORD UNIV CA DEPT OF INDUSTRIAL ENGINEERING
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We have made progress on nanoscale temperature control for advanced manufacturing using two different approaches based on scanning probe technology. The first approach is NSOM-based and uses radiation interaction at the tip of a tapered, metal-coated optical fiber. This approach offers the advantage of very brief 1 microsecond heating and temperature detection. To aid with the development of this approach, we have performed extensive far-field laser reflectance thermometry studies with high spatial and temporal resolution 0.5 micrometer, 10 ns. We have developed an NSOM-based facility for temperature control studies using the optical fiber. The facility directs radiation from a steady Ar ion probe laser and a pulsed NdYAG laser onto samples through the optical fiber. This facility has been used to demonstrate near-field laser-reflectance thermometry for the first time. We have also demonstrated the cutting of interconnect structures using radiation from the pulsed laser. Simultaneous processing and temperature detection is a major goal for the coming year. We also aim to demonstrate near-field infrared thermometry, which promises improved sensitivity and may be most useful as a diagnostics tool for the IC industry. The second approach uses Joule heating at the tip of APM cantilevers to aid with nanoscale forming and cutting processes performed using the tip. This approach offers the advantage of precise tip-surface force control. This work is being performed collaboratively with a MEMS group at Stanford Prof. T. Kenny and researchers at IBM Almaden Drs. J. Mamin and D. Rugar, who have been developing related technology for data storage applications. This research effort is modeling the transient temperature field in the cantilever and has made approximate measurements of the tip temperature using electrical and laser reflectance methods.
- Lasers and Masers
- Manufacturing and Industrial Engineering and Control of Production Systems
- Fiber Optics and Integrated Optics