Accession Number:

ADA318423

Title:

Compound Semiconductor Electronics and Photonics.

Descriptive Note:

Final rept.,

Corporate Author:

MATERIALS RESEARCH SOCIETY PITTSBURGH PA

Personal Author(s):

• Pachavis, Robert H.

Report Date:

1996-11-01

Pagination or Media Count:

444.0

Abstract:

This proceedings volume is the record from a Materials Research Society symposium covering a wide range of activity in the III-V compound semiconductor electronics and photonics arena. In particular, processing modules such as wet an dry etching, ohmic and Schottky contact formation, ion implantation, annealing and dielectric deposition, along with the performance of completed devices such as long- and short-wavelength laser diodes, VCSELs, QWIPs, heterostructure field effect transistors and heterostructure bipolar transistors are discussed. Summaries of these topics were provided by invited review papers, while contributed and poster papers described work in progress.

Descriptors:

• *ELECTRONICS
• *SEMICONDUCTORS
• *PHOTONICS
• ANNEALING
• SYMPOSIA
• MATERIALS
• DIELECTRICS
• PROCESSING EQUIPMENT
• FIELD EFFECT TRANSISTORS
• LASERS
• ETCHING
• ION IMPLANTATION
• DEPOSITION
• MODULES(ELECTRONICS)
• HETEROGENEITY
• GROUP III COMPOUNDS
• GROUP IV COMPOUNDS
• GROUP V COMPOUNDS
• SCHOTTKY BARRIER DEVICES
• DRY MATERIALS
• SHORT PULSES
• BIPOLAR TRANSISTORS
• ELECTRIC CONTACTS
• DIODE LASERS

Subject Categories:

• Electrical and Electronic Equipment
• Inorganic Chemistry
• Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE