(AASERT-92) Development of a New High-Resolution Optic for Soft X-Ray Imaging.
Final rept. 1 Jul 93-30 Jun 96,
UNIVERSITY OF CENTRAL FLORIDA ORLANDO
Pagination or Media Count:
The design of a partial Schwarzschild objective lens is given for a soft x-ray reflection imaging microscope. The system has a magnification of 200x with an object spatial resolution of less than 100nm, and a depth of focus of the system of or - 0.5 micrometers. The parameters of the objective lens consisted of two spherical mirrors are evaluated and optimized at a wavelength of 135A to obtain diffraction limited imaging over a 25 micrometers field size. The feasibility of using aspheric mirrors to improve the image quality is investigated. The field of view could reach to 40 micrometers if the spherical optic is replaced with aspheric optic. Diffractive optics is also discussed briefly due to the fabrication problems of aspheric mirrors. Either of the optic in this paper will be coated with MoSi multilayer reflecting surfaces to obtain high optical efficiency.
- Test Facilities, Equipment and Methods