Silicon Crystal Heating and Thermocouple Mounting Designs.
PITTSBURGH UNIV PA SURFACE SCIENCE CENTER
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New mounting methods for a silicon crystal and a thermocouple are described. The sample mounted in this design produced a very uniform temperature distribution when resistively heated. Deviations between the silicon temperature and the mounted thermocouple temperature have been measured. Metal contamination on the surface of the sample mounted with a thermocouple by the new methods was found to be below the detection limit of Auger electron spectroscopy. In addition, the emissivity data at 0.65 micrometers for silicon as a function of temperature has been fitted to a useful equation.
- Test Facilities, Equipment and Methods