Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups.
CORNELL UNIV ITHACA NY BAKER LAB
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A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl vinylbenzylbenzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.
- Organic Chemistry
- Polymer Chemistry
- Laminates and Composite Materials
- Miscellaneous Materials
- Printing and Graphic Arts