Accession Number:

ADA310762

Title:

Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups.

Descriptive Note:

Technical rept.,

Corporate Author:

CORNELL UNIV ITHACA NY BAKER LAB

Report Date:

1996-06-30

Pagination or Media Count:

10.0

Abstract:

A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl vinylbenzylbenzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.

Subject Categories:

  • Organic Chemistry
  • Polymer Chemistry
  • Laminates and Composite Materials
  • Miscellaneous Materials
  • Printing and Graphic Arts

Distribution Statement:

APPROVED FOR PUBLIC RELEASE