Accession Number:

ADA310503

Title:

Unconventional Systems Integration,

Descriptive Note:

Corporate Author:

MITRE CORP MCLEAN VA JASON PROGRAM OFFICE

Report Date:

1996-05-01

Pagination or Media Count:

64.0

Abstract:

This report examines some potential near term and long term applications of conventional integration in micro-electro mechanical systems MEMs.

Subject Categories:

  • Machinery and Tools

Distribution Statement:

APPROVED FOR PUBLIC RELEASE