Materials Processing and Manufacturing Technologies for Diamond Substrates Multichip Modules.
Technical rept. 1 Jan-31 Mar 95,
APPLIED SCIENCE AND TECHNOLOGY INC WOBURN MA
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During the previous quarter the AX6600 was exercised on several long runs. This has allowed us to estimate the reliability of the overall design, and some areas have been identified where design improvements are possible. We also made progress in modeling, to determining whether the current reactor design is approximately optimized. AX6600 Reactor and Facilities The reactor was run extensively, at high power, during this reporting period. One run was an attempt to produce a large, high quality sample. To optimize quality, a relatively lean lower-growth process was run. A sample weighing 94.4 grams was produced, over a 258 hour run. The growth rate was 365 mghour, yielding a sample of 6 diameter, 1 mm thick. We have performed some experiments over several runs to vary adhesion of the diamond film onto the molybdenum substrate. Improved control of the adhesion properties of the film would allow a higher yield of usable pieces. Some of the diamond produced during these runs has a distinct greenish tinge. We suspect that this is due to copper impurity in the diamond the source of the copper might be an inadequately cooled region of the stage. A redesign of this portion of the stage is under consideration. jg p2
- Manufacturing and Industrial Engineering and Control of Production Systems
- Inorganic Chemistry
- Electrical and Electronic Equipment