Accession Number:
ADA297588
Title:
Tunneling Acoustic Microscopy.
Descriptive Note:
Summary rept. 15 Jun 94-31 May 95,
Corporate Author:
STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS
Personal Author(s):
Report Date:
1995-07-20
Pagination or Media Count:
12.0
Abstract:
The objectives of this research are to develop ultrasonic sensors and actuators using silicon micro machining, and to develop theoretical models of the behavior of these devices. A number of applications are envisaged in the fields of in-situ sensors, ranging, hydrophones, sensors for scanning atomic tips in imaging and lithography, and non destructive evaluation. MM
Descriptors:
Subject Categories:
- Electrical and Electronic Equipment
- Acoustics