Accession Number:

ADA297588

Title:

Tunneling Acoustic Microscopy.

Descriptive Note:

Summary rept. 15 Jun 94-31 May 95,

Corporate Author:

STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS

Personal Author(s):

Report Date:

1995-07-20

Pagination or Media Count:

12.0

Abstract:

The objectives of this research are to develop ultrasonic sensors and actuators using silicon micro machining, and to develop theoretical models of the behavior of these devices. A number of applications are envisaged in the fields of in-situ sensors, ranging, hydrophones, sensors for scanning atomic tips in imaging and lithography, and non destructive evaluation. MM

Subject Categories:

  • Electrical and Electronic Equipment
  • Acoustics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE