Accession Number:

ADA297585

Title:

Synopsis of Chemical Perspectives of Microelectronic Materials Fall Meeting of the Materials Research Society Held at Boston, Massachusetts on November 27 - December 2, 1994.

Descriptive Note:

Final rept.,

Corporate Author:

MATERIALS RESEARCH SOCIETY UNIVERSITY PARK PA

Personal Author(s):

Report Date:

1994-01-01

Pagination or Media Count:

4.0

Abstract:

Symposium E opened with presentations spanning a range of new directions in the Chemistry of Electronic Materials. Novel methods for patterning or deposition of materials and for IN SITU monitoring of materials processing were highlighted. Very fine dimensional control over growth using focussed laser beams, controlled use of surface chemistry, and photochemistry were all demonstrated. Several commercial applications of monolayer control of film growth and uniformity using atomic layer epitaxy were reported. IN SITU probing of surface species and topography during film growth using IR spectroscopy, and TEM and AFM microscopies revealed new details of growth mechanisms. Despite decades of work in Si chemistry, this area continues to thrive. jg p.1

Subject Categories:

  • Electrical and Electronic Equipment
  • Physical Chemistry
  • Electrooptical and Optoelectronic Devices
  • Laminates and Composite Materials
  • Atomic and Molecular Physics and Spectroscopy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE