The Nucleation of Crystalline Films From Vapor Phase Reactants.
Final rept. 1 Sep 91-31 Oct 94,
BROWN UNIV PROVIDENCE RI DIV OF ENGINEERING
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Understanding and controlling the nucleation of diamond, silicon nitride, and silicon oxynitride was the primary objective of this research program, This work has made it possible to form the desired phase under more favorable processing conditions, and has also led to better control of the resultant film microstructures and properties. In this research we have focused on the use of thin interlayers to control and enhance nucleation. In the case of silicon oxynitride, we have also demonstrated the potential for using thin interlayers to enhance materials properties i.e., oxidation resistance. jg
- Physical Chemistry
- Inorganic Chemistry
- Ceramics, Refractories and Glass