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Low Voltage Electron Beam Lithography,
NAVAL RESEARCH LAB WASHINGTON DC
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The software has been completed for Monte-Carlo simulation of scattering of low energy electrons from a line edge using the new low voltage scattering cross-sections developed under this contract. The software properly treats crossings of all surfaces. For example between the sidewall-gap-substrate. This includes re-entrant sidewalls with an undercut. KAR
APPROVED FOR PUBLIC RELEASE