Surface Damage Effects Generated by a Fast-Pulse Laser Beam.
NAVAL RESEARCH LAB WASHINGTON DC
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A fast-pulse laser was used to induce damage on the surface of a polished silicon wafer. Effects of focused-laser heating at threshold for damage were examined with high-resolution imaging microscopes. The extent and characteristics of various ripple structure were measured with an atomic force microscope.
- Physical Chemistry
- Inorganic Chemistry
- Lasers and Masers