Accession Number:

ADA289131

Title:

Surface Damage Effects Generated by a Fast-Pulse Laser Beam.

Descriptive Note:

Corporate Author:

NAVAL RESEARCH LAB WASHINGTON DC

Personal Author(s):

• Burkhalter, P. G.
• Konnert, J. H.
• Gabl, E. F.

Report Date:

1994-12-06

Pagination or Media Count:

15.0

Abstract:

A fast-pulse laser was used to induce damage on the surface of a polished silicon wafer. Effects of focused-laser heating at threshold for damage were examined with high-resolution imaging microscopes. The extent and characteristics of various ripple structure were measured with an atomic force microscope.

Descriptors:

• *DAMAGE
• *LASER BEAMS
• *SURFACE PROPERTIES
• *PULSES
• MEASUREMENT
• STRUCTURES
• PULSED LASERS
• HIGH RESOLUTION
• SURFACES
• SILICON
• HEATING
• IMAGES
• RIPPLES
• WAFERS
• MICROSCOPES
• ATOMIC PROPERTIES
• SHORT PULSES
• PULSE DURATION MODULATION

Subject Categories:

• Physical Chemistry
• Inorganic Chemistry
• Lasers and Masers
• Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE