Accession Number:

ADA285621

Title:

Epitaxial Liftoff Technology Onto Processed Silicon Foundry Wafers

Descriptive Note:

Final rept.

Corporate Author:

CALIFORNIA UNIV LOS ANGELES DEPT OF ELECTRICAL ENGINEERING

Personal Author(s):

Report Date:

1994-01-31

Pagination or Media Count:

2.0

Abstract:

Technical Objectives Research the application of liftoff transfer of epitaxial material to foreign substrates including surface chemistry electrical, mechanical, thermal and optical properties of Van der Waals bonded materials. III-V devices bonded to silicon circuitry and to other substrates with enhanced optical, electrical or thermal properties, integrated optical devices incorporating lifted-off material andor devices with LiNbO sub 3, glass or other substrates.

Subject Categories:

  • Inorganic Chemistry
  • Electrical and Electronic Equipment
  • Laminates and Composite Materials
  • Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE