Accession Number:

ADA285060

Title:

Materials Processing and Manufacturing Technologies for Diamond Substrates Multichip Modules

Descriptive Note:

Technical rept., Jan-Mar 1994

Corporate Author:

APPLIED SCIENCE AND TECHNOLOGY INC WOBURN MA

Personal Author(s):

Report Date:

1994-08-15

Pagination or Media Count:

3.0

Abstract:

In this quarter we have continued our baseline program to optimize the throughput of diamond in conventional chemistries, achieving the target 1 g hr of deposition at 75 kW, completed modifications to the AX6600 substrate stage allowing full power operation on a continuous basis, continued work on release techniques using novel materials for successful production of free standing 6 inch diameter diamond, constructed a thermal conductivity test stand for quality measurements on free standing diamond films.

Subject Categories:

  • Inorganic Chemistry
  • Electrical and Electronic Equipment
  • Laminates and Composite Materials
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE