Accession Number:

ADA282470

Title:

Military Applications of Microelectromechanical Systems

Descriptive Note:

Corporate Author:

RAND CORP SANTA MONICA CA

Personal Author(s):

Report Date:

1993-01-01

Pagination or Media Count:

66.0

Abstract:

Microelectromechanical systems MEMS or, more broadly, microengineered systems are essentially small devices on the scale of a few millimeters or less. They are often made using variations on techniques used in fabricating electronics silicon is etched to create very fine, often very flat, structures. However, instead of transistors and diodes, small motors, gears, and sensors are made. Other techniques such as deep X-ray synchrotron lithography, electric discharge machining, and acoustic laser etching are also employed, often to create three-dimensional structures. These and other techniques are touched upon in the body of this report.

Subject Categories:

  • Electrical and Electronic Equipment
  • Military Operations, Strategy and Tactics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE