Field Emitter Array RF Amplifier Development Project Phase One, Cathode Technology Development
Quarterly progress rept. no. 6, 1 Jan-31 Mar 1993,
MICROELECTRONICS CENTER OF NORTH CAROLINA RESEARCH TRIANGLE PARK
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Sixth Quarterly RD Status Technical report for the Field Emitter Array RF Amplifier Development Project - Phase I, Cathode Technology Development. Effects of anode proximity on emission current capture is being examined in the electrical testing program. Two new processes for gate opening alignment are under development. Both eliminate the necessity of retaining the nitride caps on the field emitter tips through the entire processing sequence. Refinements in processing continue. Failure analysis of field emitter arrays from two lots was completed. Five mechanisms in two classes were identified as contributors to device failures those mechanisms that destroyed working emitters, and those that prevented emitters from working. In anticipation of continued ARPA funding for the field emitter project, revised budgetary and scheduling information was prepared. Design of the fabrication process and reticle set for the next generation of devices was begun. Field emission, Cold cathode, RF Amplifier.
- Electrical and Electronic Equipment