Accession Number:

ADA279932

Title:

Field-Emitter Arrays for RF Vacuum Microelectronics

Descriptive Note:

Quarterly technical rept. no. 9, 1 Oct-31 Dec 1993

Corporate Author:

SRI INTERNATIONAL MENLO PARK CA

Personal Author(s):

• Spindt, C. A.

Report Date:

1994-05-27

Pagination or Media Count:

44.0

Abstract:

SRI International has completed the ninth quarter of a program to develop field-emitter arrays for vacuum microelectronics. We have met the first- phase program goals of 5 mA total emission, with a current density of 5 Asq cm for at least 2 hours and demonstrated modulation of the emission current at a frequency of 1 GHz. An evaluation was made of deposition processes and cone materials that could lead to improved tall and sharp cone geometries for low- capacitance cathode fabrication. Principal efforts involved investigation of the limited emission of high-frequency cathode samples, continued stability tests on high-frequency cathodes to determine the effectiveness of processes designed to avoid contamination, and capacitance measurements on cathode samples incorporating an electrostatic shield designed to prevent fringing fields from the base electrode from influencing the trajectories of emitted electrons. Field-emitter array, Vacuum microelectronics, Low-capacitance cathode.

Descriptors:

• *CATHODES
• *MICROELECTRONICS
• *GLOW DISCHARGES
• *EMITTERS
• TEST AND EVALUATION
• EMISSION
• IONS
• STABILITY
• HIGH FREQUENCY
• SCANNING ELECTRON MICROSCOPES
• PLASMAS(PHYSICS)
• ELECTRODES
• MICROWAVE AMPLIFIERS
• CAPACITANCE
• ELECTROSTATICS
• ELECTROSTATIC CHARGE
• RADIOFREQUENCY
• TRAJECTORIES
• MODULATION
• CONTAMINATION
• SHIELDING
• VACUUM
• ARRAYS
• FABRICATION
• CURRENT DENSITY
• MICROWAVES
• DEPOSITION
• ELECTRONS

Subject Categories:

• Electrical and Electronic Equipment
• Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE