Accession Number:

ADA279694

Title:

Radiation-Induced Modifications of Allylamino-Substituted Polyphosphazenes

Descriptive Note:

Technical rept.

Corporate Author:

PENNSYLVANIA STATE UNIV UNIVERSITY PARK DEPT OF CHEMISTRY

Report Date:

1994-05-17

Pagination or Media Count:

20.0

Abstract:

A review describing efforts to synthesize allylamino-substituted polyphosphazenes and characterize their sensitivity to radiation, and determine the value of using such polymers as new and better resist materials for microlithographic applications. Polyphosphazenes, Polymers, Radiation, Microlithography

Subject Categories:

  • Organic Chemistry
  • Radiation and Nuclear Chemistry
  • Polymer Chemistry
  • Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE