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Accession Number:
ADA279694
Title:
Radiation-Induced Modifications of Allylamino-Substituted Polyphosphazenes
Descriptive Note:
Technical rept.
Corporate Author:
PENNSYLVANIA STATE UNIV UNIVERSITY PARK DEPT OF CHEMISTRY
Report Date:
1994-05-17
Pagination or Media Count:
20.0
Abstract:
A review describing efforts to synthesize allylamino-substituted polyphosphazenes and characterize their sensitivity to radiation, and determine the value of using such polymers as new and better resist materials for microlithographic applications. Polyphosphazenes, Polymers, Radiation, Microlithography
Distribution Statement:
APPROVED FOR PUBLIC RELEASE