Accession Number:

ADA279694

Title:

Radiation-Induced Modifications of Allylamino-Substituted Polyphosphazenes

Descriptive Note:

Technical rept.

Corporate Author:

PENNSYLVANIA STATE UNIV UNIVERSITY PARK DEPT OF CHEMISTRY

Personal Author(s):

• Welker, M. F.
• Allock, H. R.
• Grune, G. L.
• Chern, R. T.
• Stannett, V. T.

Report Date:

1994-05-17

Pagination or Media Count:

20.0

Abstract:

A review describing efforts to synthesize allylamino-substituted polyphosphazenes and characterize their sensitivity to radiation, and determine the value of using such polymers as new and better resist materials for microlithographic applications. Polyphosphazenes, Polymers, Radiation, Microlithography

Descriptors:

• *RADIATION
• *POLYMERS
• *PHOSPHAZENE
• MODIFICATION
• SENSITIVITY
• LITHOGRAPHY
• COMPOSITE MATERIALS
• MATERIALS

Subject Categories:

• Organic Chemistry
• Radiation and Nuclear Chemistry
• Polymer Chemistry
• Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE