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Accession Number:
ADA278424
Title:
Simplified Ultra-High Resolution Optic for Soft-X-Ray Imaging
Descriptive Note:
Final rept. 1 Jul 1992-31 Dec 1993
Corporate Author:
UNIVERSITY OF CENTRAL FLORIDA ORLANDO
Report Date:
1993-12-31
Pagination or Media Count:
10.0
Abstract:
In this report, we outline the design considerations and construction of an EUV reflection imaging microscope. The parameters of the microscope and the debris measurements of the source are presented. The reasons for selecting a laser-produced plasma LPP source and a Schwarzschild objective are described. While most research efforts for the development of soft-x-ray sources such as soft-x-ray lasers pursue the generation of shorter and shorter wavelengths down to the water window, the EUV and soft-x-ray spectral regions are also ideal wavelengths for applications in chemistry and biology due to the photon energy being close to the molecular bond energy. In this report, we outline the design considerations and construction of an EUV reflection imaging microscope. The parameters of the microscope and the debris measurements of the source are presented. The reasons for selecting a laser-produced plasma LPP source and a Schwarzschild objective are described. While most research efforts for the development of soft-x-ray sources such as soft-x-ray lasers pursue the generation of shorter and shorter wavelengths down to the water window, the EUV and soft-x-ray spectral regions are also ideal wavelengths for applications in chemistry and biology due to the photon energy being close the molecular bond energy.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE
