Accession Number:

ADA277589

Title:

Atomic Force Microscopy

Descriptive Note:

Inhouse rept. Oct 1991-Jun 1993

Corporate Author:

ROME LAB ROME NY

Personal Author(s):

Report Date:

1993-12-01

Pagination or Media Count:

21.0

Abstract:

Atomic Force Microscopy AFM has been used to study the surface microstructure of aluminum metallization. The effects of plasma cleaning and annealing on the surface structure of aluminum are shown and discussed. A brief description of the theories of Atomic Force Microscopy AFM and Scanning Tunneling Microscopy STM is given. The technique of AFM, the importance of tip geometry and sample orientation on image appearance and the significance of edgetip interaction on interpretation of AFM data are discussed. Atomic level imaging capability of AFM is also demonstrated. Atomic force microscopy, Aluminum metallization, Thin films.

Subject Categories:

  • Physical Chemistry
  • Coatings, Colorants and Finishes
  • Optics
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE