ESDIAD Study of Step Site Bonding on a Vicinal Si(100) Surface Upon Cl2 Adsorption
PITTSBURGH UNIV PA SURFACE SCIENCE CENTER
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Characteristic chlorine bonding sites have been detected on a vicinal Si100 single crystal surface exposing Si100 terraces. 7-8 Si atoms in width. These terraces are separated by 2-atom layer height steps. Following annealing to 673 K. three C1 beams are observed by the electron stimulated desorption ion angular distribution ESDIAD method. Two of the C1 beams originate from silicon-dimer dangling bond sites on the Si100 terraces. The third C1 beams is associated with the Si-C1 bond on the step sites. and it emits Cl at a polar angle of 24 1 deg with respect to the 100 direction. in the downstairs direction. The direction of Cl emission from the step site is qualitatively consistent with the theoretical model of the step reconstruction proposed by Chadi. Chlorine, Step sites, Si100, Vicinal, Etching.
- Inorganic Chemistry
- Physical Chemistry