Accession Number:

ADA275888

Title:

Development of Large Area rf Induction Plasmas for Cost Effective Diamond

Descriptive Note:

Quarterly rept. no. 1, 20 Oct-20 Dec 1993

Corporate Author:

RESEARCH TRIANGLE INST (RTI) RESEARCH TRIANGLE PARK NC

Personal Author(s):

Report Date:

1993-10-01

Pagination or Media Count:

14.0

Abstract:

Progress continues on the development of a large area rf induction plasma system. An early problem with a hole in the deposition pattern has been assigned to poor gas distribution. The injection port has been modified to eliminate the hole . 30 microns films on quartz substrates have been fabricated. Plasma modeling and gas modeling have been initiated. A downstream process gas monitor has been proven. A smaller scale system for evaluating rf power vs. rate data is under construction. And, a data acquisition and process control package has been identified and ordered from National Instruments. Diamond, Large-area, rf, Induction.

Subject Categories:

  • Physical Chemistry
  • Laminates and Composite Materials
  • Plasma Physics and Magnetohydrodynamics
  • Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE