Sputtering of Single Crystals: Experimental Evidence of the Ejection Process
PENNSYLVANIA STATE UNIV UNIVERSITY PARK DEPT OF CHEMISTRY
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The objective of this review is to summarize recent experimental evidence of the sputtering of atoms from single crystal targets. The information is extracted primarily from literature published within the last 10 years and is meant to compliment other recent reviews on single crystal sputtering. The emphasis of the discussion is on experiments that are performed on well characterized surfaces obtained under low-dose conditions. Because of this restriction, most of the experiments utilized laser positionization as the detection scheme. The discussion of experimental results is focused mainly toward comparison with results of molecular dynamics computer simulations. The review includes a discussion of experimental techniques, a sampling of results obtained at normal incidence with keV Ar ions, and others obtained at variable incident angles. In addition, energy and angular distributions of ground-state and excited-state sputtered atoms are compared in detail.
- Fabrication Metallurgy
- Atomic and Molecular Physics and Spectroscopy