Accession Number:

ADA275154

Title:

The Effects of Molecular Orientation Geometry and Surface Anisotropy Upon Etching

Descriptive Note:

Final rept. 15 Jan 1992-14 Jan 1994

Corporate Author:

CALIFORNIA UNIV SANTA BARBARA

Personal Author(s):

Report Date:

1993-12-01

Pagination or Media Count:

3.0

Abstract:

Sticking probabilities have been measured for molecular chlorine upon the GaAs 100 Ga-rich c8x2, GaAs100 As-rich C2.8 and GaAs110 stoichiometric 1x1 surfaces. The sticking probability has measured as a function of incident translational energy 0.038 to 0.66 eV, surface temperature 150 K - 835 K, angle of incidence 0 deg to 37 deg, and surface chlorine coverage. Our data indicate the presence of both precursor and direct activated chemisorption mechanisms on all three surfaces. Total energy scaling is observed on both the GaAs100 Ga-rich c8x2 surface and the stoichiometric 1x1 surface for both precursor mediated and direct activated chemisorption, indicating a highly corrugated gas-surface interaction potential.

Subject Categories:

  • Physical Chemistry
  • Metallurgy and Metallography
  • Crystallography
  • Atomic and Molecular Physics and Spectroscopy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE