Accession Number:

ADA273356

Title:

Intelligent Control of Chemical Vapor Disposition Processes

Descriptive Note:

Final rept. 1 Sep 1990-31 Aug 1993

Corporate Author:

INTEGRATED SYSTEMS INC SANTA CLARA CA

Personal Author(s):

• Shah, Sunil

Report Date:

1993-09-01

Pagination or Media Count:

88.0

Abstract:

Significant progress has been made in improving process control on the Technion TB reactor by using a model-based approach to control design. This approach has led to improvements in two areas. First, it has made the control design process more efficient by reducing the time required by a trial and error approach. This will lead to a cost saving in manpower. Second, it has led to design of effective controllers whose design in not evident in a trial and error approach. This has led to improved regulation of actuation and deposition conditions. Both these improvements are expected to lead to a quicker deployment to new deposition strategies and eventually to the cost-effective production of diamond. Progress made under this contract has set the stage for further refinement and implementation of these control strategies in a production environment. Work in this area is under progress on a related contract with Norton Diamond film entitled Integration of Intelligent Process Control and Monitoring.

Descriptors:

• *CONTROL SYSTEMS
• *DIAMONDS
• *CHEMICAL VAPOR DEPOSITION
• TEMPERATURE
• ENVIRONMENTS
• PRODUCTION
• SUBSTRATES
• DEPOSITION
• PRESSURE
• CHAMBERS
• ACTUATION
• SAVINGS
• REGULATIONS
• ROTATION
• POWER SUPPLIES
• MANPOWER
• GASES
• COMPOSITE MATERIALS
• FILMS
• MODELS
• STRATEGY
• DEPLOYMENT

Subject Categories:

• Physical Chemistry
• Laminates and Composite Materials
• Manufacturing and Industrial Engineering and Control of Production Systems
• Human Factors Engineering and Man Machine Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE