Accession Number:

ADA272567

Title:

Field Emitter Array RF Amplifier Development Project, ARPA Contract #MDA 972-91-C-0028 Phase 1, Option 1

Descriptive Note:

Quarterly R and D status rept. No. 8, 16 Jul-15 Oct 93,

Corporate Author:

MICROELECTRONICS CENTER OF NORTH CAROLINA RESEARCH TRIANGLE PARK

Personal Author(s):

Report Date:

1993-10-15

Pagination or Media Count:

45.0

Abstract:

Successful electrical testing was performed on 44,460 tip array. High-frequency testing is underway, both in-house and at Litton subprogram site. The first two runs of 2 microns column devices are finished. Arrays of 232,630 tips have been successfully fabricated and are being electrically tested. Two fabrication runs of 4 microns column devices have been started and are proceeding on a revised schedule after delays in the initial photolithography step. More rigorous uniformity requirements have resulted in modification of the initial photolithography steps. An in-situ cleaning system was installed and evaluated in the test chamber. Additional testing is needed to bring the cleaning process under control. Development of low work function and metal coatings has focused on the optimization of the deposition process for tantalum nitride, and the development of deposition processes for lanthanum hexaboride and zirconium carbide. The chemical composition, resistivity, and growth rate of the deposited films is being analyzed by several methods. A device serialization method was implemented to improve record keeping on field emitter device testing.

Subject Categories:

  • Electrical and Electronic Equipment
  • Coatings, Colorants and Finishes
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE