Accession Number:

ADA270003

Title:

RF Vacuum Microelectronics

Descriptive Note:

Quarterly progress rept.

Corporate Author:

RAYTHEON CO LEXINGTON MA RESEARCH DIV

Personal Author(s):

Report Date:

1993-09-16

Pagination or Media Count:

6.0

Abstract:

This document reports progress on the following 1 Stress in evaporated and sputtered moly metalization reduced 2 Two chips evaluated at moderate current levels 6 deviceschip and coated with 200 angstroms of silicon and zirconium carbide respectively 3 High frequency alumina redesigned and 4 Masks for optical lithography for low resolution steps obtained for increased throughput.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE