Accession Number:

ADA265685

Title:

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals, and Devices

Descriptive Note:

Corporate Author:

MICROELECTRONICS CENTER OF NORTH CAROLINA RESEARCH TRIANGLE PARK

Personal Author(s):

Report Date:

1993-03-21

Pagination or Media Count:

6.0

Abstract:

The main objective of the Institute was to bring together scientists from different fields of research such as semiconductor, oxide, and metallic materials, as well as those working on the development of systems for thin film processing and characterization. The highly interdisciplinary nature of the Institute allowed participant scientists to interchange ideas in an environment rarely available in other international conferences. This has opened a window of opportunities for collaborations in research and development, which more and more will require interdisciplinary exchange of ideas.

Subject Categories:

  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE