Accession Number:

ADA265150

Title:

Ellipsometry Studies of Semiconductors Surface Cleaning

Descriptive Note:

Technical rept.

Corporate Author:

NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1993-05-04

Pagination or Media Count:

8.0

Abstract:

Ellipsometry is shown to provide a sensitive evaluation of the surface cleaning process based on in-situ and ex-situ studies of the cleaning of Si, Ge, and InP surfaces. Both single wavelengths and spectroscopic ellipsometry are shown to be applicable. The essential of the measurement and sample results are discussed. Ellipsometry, Surface cleaning

Subject Categories:

  • Electrical and Electronic Equipment
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE