Accession Number:

ADA263402

Title:

Materials and Manufacturing Processing; Special Issue on Hard Carbon Films

Descriptive Note:

Corporate Author:

MATERIALS MODIFICATION INC FAIRFAX VA

Personal Author(s):

Report Date:

1993-01-01

Pagination or Media Count:

135.0

Abstract:

Laser processing of polycrystalline diamond and amorphous carbon films is shown to be a promising technology for micropatterning of these materials in electronics and other applications. By using excimer lasers, holes and pits have been formed in 10-60 micrometers thick diamond films by physical etching with ablation rates of up to 300 nmpulse. The channels of micrometer scale width were created in diamond-like carbon films on silicon by chemical etching in oxygen by the scanning with a cw Ar laser beam. At laser powers below the etching threshold, a transformation of amorphous carbon to graphitic carbon allows the formation of conductive lines of different geometry in dielectric carbon layers.

Subject Categories:

  • Physical Chemistry
  • Lasers and Masers
  • Coatings, Colorants and Finishes
  • Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE