Accession Number:

ADA263103

Title:

New Developments in Vacuum Microelectronics

Descriptive Note:

Corporate Author:

FOREIGN AEROSPACE SCIENCE AND TECHNOLOGY CENTER WRIGHT-PATTERSON AFB OH

Personal Author(s):

Report Date:

1993-04-02

Pagination or Media Count:

25.0

Abstract:

This paper describes a new field-vacuum microelectronics or vacuum integrated circuits VIC. Its principle, the structure of the field emission microtriodes and microfabrication techniques and processing are given in detail. The processing for the thin field emission cathodes is also reviewed. The application of VIC and the related problems for its future development are discussed.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE