New Developments in Vacuum Microelectronics
FOREIGN AEROSPACE SCIENCE AND TECHNOLOGY CENTER WRIGHT-PATTERSON AFB OH
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This paper describes a new field-vacuum microelectronics or vacuum integrated circuits VIC. Its principle, the structure of the field emission microtriodes and microfabrication techniques and processing are given in detail. The processing for the thin field emission cathodes is also reviewed. The application of VIC and the related problems for its future development are discussed.
- Electrical and Electronic Equipment