Ir-Zr Alloys as Diffusion Barriers between Cu and Si (100)
GEORGETOWN UNIV WASHINGTON DC DEPT OF CHEMISTRY
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Ir-Zr alloys were studied as diffusion barriers between Cu and Si with XRD, AES, RBS and resistivity measurements. An amorphous Ir 0.84 Zr alloy was found to be a better diffusion barrier than a polycrystalline ir 2.85 Zr alloy, with the amorphous alloy serving as a satisfactory diffusion barrier up to 800 deg C. The diffusion constants were determined at various temperatures, and the activation energy for Si out-diffusion in CuIr 0.84 ZrSi was obtained. ... Ir-Zr Alloys, Diffusion barriers.
- Physical Chemistry
- Properties of Metals and Alloys