Accession Number:

ADA261919

Title:

Ir-Zr Alloys as Diffusion Barriers between Cu and Si (100)

Descriptive Note:

Technical rept.

Corporate Author:

GEORGETOWN UNIV WASHINGTON DC DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1993-12-01

Pagination or Media Count:

11.0

Abstract:

Ir-Zr alloys were studied as diffusion barriers between Cu and Si with XRD, AES, RBS and resistivity measurements. An amorphous Ir 0.84 Zr alloy was found to be a better diffusion barrier than a polycrystalline ir 2.85 Zr alloy, with the amorphous alloy serving as a satisfactory diffusion barrier up to 800 deg C. The diffusion constants were determined at various temperatures, and the activation energy for Si out-diffusion in CuIr 0.84 ZrSi was obtained. ... Ir-Zr Alloys, Diffusion barriers.

Subject Categories:

  • Physical Chemistry
  • Properties of Metals and Alloys
  • Crystallography
  • Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE