Multivariable Control for Flexible IC Processing
Final annual rept. 1 Oct 1991-30 Sep 1992
STANFORD UNIV CA DEPT OF ELECTRICAL ENGINEERING
Pagination or Media Count:
The objective of this DARPA research project was to develop real-time control systems using in-situ sensors for semiconductor manufacturing. Our initial application was the development of a temperature control system for Rapid Thermal Processing RTP equipment. We developed mathematical models of RTP, analyzed them. identified and validated these models, deduced several control algorithms and finally applied them to real systems at Stanford University and at Texas Instruments. Also, based on our analysis, we modified the design of the system hardware lamp array and also proposed an optimal lamp array design technique.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems