Frequency Trimming Technique for Surface Acoustic Wave Devices
ARMY LAB COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY AND DEVICES LAB
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Currently, there is an in-house effort to produce a vibration- insensitive surface acoustic wave SAW resonator to stabilize the outputs of state-of-the-art SAW oscillators. One of the key elements in this investigation is the development of a simple, yet sensitive frequency trimming procedure to adjust the resonator frequency of a fabricated device. Background and procedural information for performing frequency trimming on a SAW resonator using a wet isotropic chemical etch are provided in this report. The results of this study revealed a trimming sensitivity of 0.33 ppmA and 11.4 of performance degradation for a 10 kHz or 100 ppm shift in the resonant frequency of a device.
- Electrooptical and Optoelectronic Devices