SAW Chemosensor. Third Progress Report (SAW Chemosensor. De derde Voortgangsrapportage)
PRINS MAURITS LABORATORIUM TNO RIJSWIJK(NETHERLANDS)
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At the Prins Maurits Laboratory TNO, work on surface acoustic wave SAW chemical sensors is being performed. Up to now the main subjects have been implementation of SAW technology on a silicon chip, the development of a SAW sensor for NO2 and the development of a SAW sensor for chemical warfare agents. This third progress report deals with the on-going work on a SAW sensor for NO2 including immobilization of the chemical interface, silicon-based SAW sensors for NO2 with and without the application of silicon nitride passivation layers, preliminary results of the development of a SAW sensor for CO2 and a chapter dealing with an automated SAW testing system developed at TNO-PML. Most of the chapters have been published in the literature.
- Line, Surface and Bulk Acoustic Wave Devices
- Chemical, Biological and Radiological Warfare