Accession Number:

ADA255980

Title:

Advanced Laser Chemical Processing For Microelectronics and Integrated Optics

Descriptive Note:

Final rept. 15 Jun 1989-15 Jun 1992,

Corporate Author:

COLUMBIA UNIV NEW YORK MICROELECTRONICS SCIENCE LAB

Report Date:

1992-08-15

Pagination or Media Count:

23.0

Abstract:

This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been a to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and b to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Optics
  • Quantum Theory and Relativity
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE