Accession Number:

ADA255977

Title:

Organization of Workshop on Emerging Technologies for In-Situ Processing

Descriptive Note:

Final rept. 15 Mar-31 Aug 1992,

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE RESEARCH LAB OF ELECTRONICS

Personal Author(s):

Report Date:

1992-08-31

Pagination or Media Count:

67.0

Abstract:

The goal of the workshop was to bring together government, industrial and university representatives to assess the progress and future direction of in situ processing of semiconductors. Since the first NATO Workshop in this topic area Cargese, Corsica in 1987 there has been surprising progress toward the industrial applications, particularly as exemplified by cluster tools and laserion beam real-time fabrication machines. The consensus of the workshop was that the economic implications of in situ processing are accelerating strongly, particularly for smaller countriesor even larger ones where the costs of traditional semiconductor factories are growing at unacceptable rates. This problem and the potential solutions were the central themes of the conference. The talks by Larrabee, Saraswat and Prabhakar pointed to the need for future factories that are smaller and use flexible intelligent manufacturing. In semiconductor device manufacturing, in particular, smaller lots, cluster tools i.e. in-situ processing, and tight process control will result in better contamination control and lower cost. The other talks of the conference provided specified examples of advances in in-situ processing that will contribute to making this vision of intelligent flexible manufacturing a reality.

Subject Categories:

  • Electrical and Electronic Equipment
  • Lasers and Masers
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Printing and Graphic Arts
  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE