Accession Number:

ADA254570

Title:

Development of a Liquid Phase Epitaxial Growth System for Fabrication of Indium Phosphide Based Devices

Descriptive Note:

Corporate Author:

ROME LAB HANSCOM AFB MA

Personal Author(s):

• Gregg, Michael
• Vaccaro, Kenneth

Report Date:

1991-04-01

Pagination or Media Count:

50.0

Abstract:

We have developed a liquid phase epitaxy system for growth of thin- film, III-V materials. We have focused primarily on InP, InGaAs, and InGaAsP growth for fabricating electro-optical devices. We have developed a standard approach for each type of growth and diagnostic techniques for characterization purposes.

Descriptors:

• *EPITAXIAL GROWTH
• *INDIUM PHOSPHIDES
• LIQUIDS
• MATERIALS
• SEMICONDUCTORS
• LIQUID PHASES
• APPROACH
• STANDARDS
• PHASE
• THIN FILMS
• FILMS

Subject Categories:

• Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE