Accession Number:

ADA254570

Title:

Development of a Liquid Phase Epitaxial Growth System for Fabrication of Indium Phosphide Based Devices

Descriptive Note:

Corporate Author:

ROME LAB HANSCOM AFB MA

Personal Author(s):

Report Date:

1991-04-01

Pagination or Media Count:

50.0

Abstract:

We have developed a liquid phase epitaxy system for growth of thin- film, III-V materials. We have focused primarily on InP, InGaAs, and InGaAsP growth for fabricating electro-optical devices. We have developed a standard approach for each type of growth and diagnostic techniques for characterization purposes.

Subject Categories:

  • Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE