Development of a Liquid Phase Epitaxial Growth System for Fabrication of Indium Phosphide Based Devices
ROME LAB HANSCOM AFB MA
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We have developed a liquid phase epitaxy system for growth of thin- film, III-V materials. We have focused primarily on InP, InGaAs, and InGaAsP growth for fabricating electro-optical devices. We have developed a standard approach for each type of growth and diagnostic techniques for characterization purposes.
- Electrooptical and Optoelectronic Devices