Isotopically Enriched (28)Si Crystal for Electronics Applications
YALE UNIV NEW HAVEN CT DEPT OF ELECTRICAL ENGINEERING
Pagination or Media Count:
We have designed and fabricated the sample holder for thermal conductivity measurements of the Si 28 epitaxial films. We have designed and fabricated the mask set for making the test structures on the Si28 epitaxial wafers. We have fabricated some test structures on regular Si epitaxial wafers, and preliminary experiments are underway to measure the thermal conductivity of these samples.
- Electrical and Electronic Equipment