Basic Principles of Organometallic Vapor Phase Epitaxy
UTAH UNIV SALT LAKE CITY DEPT OF MATERIALS SCIENCE AND ENGINEERING
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Crystal growth processes in general and epitaxy in particular are often discussed in terms three disciplines thermodynamics, mass transport and hydrodynamics, and chemical reaction kinetics. This paper will concentrate on two of these, the thermodynamic and kinetic aspects of organometallic vapor phase epitaxy OMVPE. Three major influences of thermodynamics will be discussed 1 Thermodynamics defines the driving force and hence the upper limit of growth rate. This occurs only when all reactants in the system are allowed to equilibrate with the substrate. 2 Thermodynamics often controls stoichiometry and the solid composition of alloys. An understanding of thermodynamic and kinetic constraints leads to the ability to grow metastable alloys. 3 The driving force for phase separation andor ordering into natural superlattice structures during growth is also governed by thermodynamics. The actual ordered structures observed are dependent on the surface kinetics. This aspect of kinetics will be addressed in addition to the kinetics of both homogeneous and heterogeneous chemical reactions occurring for a variety of precursor molecules. Each of these topics is addressed in terms of fundamental concepts, with examples from recent research on the OMVPE growth of IIIV semiconductor compounds and alloys.
- Organic Chemistry