Accession Number:

ADA250058

Title:

Synthesis of Diamond Films with Pulsed Plasma

Descriptive Note:

Corporate Author:

NAVAL COMMAND CONTROL AND OCEAN SURVEILLANCE CENTER RDT AND E DIV SAN DIEGO CA

Personal Author(s):

Report Date:

1992-03-01

Pagination or Media Count:

9.0

Abstract:

Diamond films were grown in plasmas formed with microwaves that were modulated with a pulsed generator. Films obtained with the use of pulse periods in the nanosecond, microsecond, and millisecond ranges were compared to baseline films which were obtained with a CW plasma. The deposited films were examined with SEM, XRD and Micro-Raman spectroscopy. For the experimental conditions used, the diamond films growth rates and quality improved with increasing pulse duration while maintaining a duty cycle at nearly 50 percent, and reached a maximum with CW generated films. This was attributed primarily to an increasing degree of supersaturation of atomic hydrogen at the growth surface with increasing pulse time. diamond technology.

Subject Categories:

  • Physical Chemistry
  • Geology, Geochemistry and Mineralogy
  • Coatings, Colorants and Finishes
  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE