Synthesis of Diamond Films with Pulsed Plasma
NAVAL COMMAND CONTROL AND OCEAN SURVEILLANCE CENTER RDT AND E DIV SAN DIEGO CA
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Diamond films were grown in plasmas formed with microwaves that were modulated with a pulsed generator. Films obtained with the use of pulse periods in the nanosecond, microsecond, and millisecond ranges were compared to baseline films which were obtained with a CW plasma. The deposited films were examined with SEM, XRD and Micro-Raman spectroscopy. For the experimental conditions used, the diamond films growth rates and quality improved with increasing pulse duration while maintaining a duty cycle at nearly 50 percent, and reached a maximum with CW generated films. This was attributed primarily to an increasing degree of supersaturation of atomic hydrogen at the growth surface with increasing pulse time. diamond technology.
- Physical Chemistry
- Geology, Geochemistry and Mineralogy
- Coatings, Colorants and Finishes
- Plasma Physics and Magnetohydrodynamics