Accession Number:

ADA248727

Title:

Bimonthly Report Detailing Work done on Contract N00014-89-C-2238 During February - March 1992

Descriptive Note:

Bimonthly rept. no. 14

Corporate Author:

MICRION CORP PEABODY MA

Personal Author(s):

Report Date:

1992-04-13

Pagination or Media Count:

2.0

Abstract:

Three algorithms to perform a automated focusing, stigmation and alignment were written and then tested on a column on the column test stand. Auto-focus and stigmation routines involve analysis of the variance of an image and iterative changes to appropriate lens voltages to maximize the peak in variance. This technique is essentially the same as that used for SEM focus and stigmation. Automated alignment as opposed to manual tweaking involves adjustment of either the source or the aperture position until there is no image motion when either the first or second lens focus voltage is changed. A correlation method is used to detect image motion for the auto-alignment technique. These auto-routines have all been tested extensively on the column test stand - the algorithms need to be transferred to the 0.25 um X-ray machine as the final step.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE