Accession Number:

ADA248447

Title:

Materials Processing of Diamond: Etching, Doping by Ion Implantation and Contact Formation

Descriptive Note:

Final technical rept. 1 May 1987-31 Dec 1991

Corporate Author:

NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF PHYSICS AND ASTRONOMY

Personal Author(s):

Report Date:

1992-03-31

Pagination or Media Count:

16.0

Abstract:

A summary of work achieved under this grant is given, including ion implantation doping of natural diamond, annealing of implantation damage, characterization methods, contact formation using a sputtering method, and plasma etching.

Subject Categories:

  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE