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Final technical rept. Jun 1989-May 1991
GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL ENGINEERING
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The purpose of this investigation was to demonstrate a capability to integrate micro-machining techniques with SOI technology for the fabrication of optical waveguide structures that can be controlled electro-mechanically. A significant part of this effort was devoted to the experimental development of a process sequence for the fabrication of some representative structures that are described in this report. We also present, supported by modeling, a discussion of electro-mechanically induced optical effects as they relate to two particular structures a silicon cantilever beam and a silicon bridge. Emphasis is focused on the transformation of optical waveguiding properties due to elastic deformation of these structures for purposes of switching and transduction.
APPROVED FOR PUBLIC RELEASE