Accession Number:

ADA247957

Title:

Silicon-On-Insulator Photonics

Descriptive Note:

Final technical rept. Jun 1989-May 1991

Corporate Author:

GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL ENGINEERING

Personal Author(s):

• Robinson, Andrew L.
• Watts, Russell

Report Date:

1991-12-01

Pagination or Media Count:

111.0

Abstract:

The purpose of this investigation was to demonstrate a capability to integrate micro-machining techniques with SOI technology for the fabrication of optical waveguide structures that can be controlled electro-mechanically. A significant part of this effort was devoted to the experimental development of a process sequence for the fabrication of some representative structures that are described in this report. We also present, supported by modeling, a discussion of electro-mechanically induced optical effects as they relate to two particular structures a silicon cantilever beam and a silicon bridge. Emphasis is focused on the transformation of optical waveguiding properties due to elastic deformation of these structures for purposes of switching and transduction.

Descriptors:

• *SILICON
• MODELS
• DEFORMATION
• STRUCTURES
• TRANSFORMATIONS
• CANTILEVER BEAMS
• BRIDGES
• ELASTIC PROPERTIES
• OPTICAL WAVEGUIDES

Subject Categories:

• Electrical and Electronic Equipment
• Coatings, Colorants and Finishes
• Fiber Optics and Integrated Optics
• Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE