Commercial Scale Production of High Temperature
Annual rept. 15 Sep 90-15 Sep 91,
CVC PRODUCTS INC ROCHESTER NY
Pagination or Media Count:
Thin films of YBa2Cu3O7-x were deposited onto substrates of up to three inch diameter by RF planar magnetron sputtering from an 8 inch diameter Y- Ba-Cu-O target. By locating the substrate above the center of the magnetron erosion ring and by placing a negative ion shield between the substrate and the target, negative ion effects are avoided. A large area, backside radiant heater brings the bare substrates up to the temperatures necessary for in situ growth of superconducting YBa2Cu3O7-x films. The YBCO sputter deposition is completely automated and a throughput of 10 two inch diameters per week from a single target is easily achieved. YBCO films have been grown on MgO and LaAlO3 substrates with critical temperature or 90 K, change of temperature 1 K, and critical current density 1 million Asq cm at 77 K. Microwave resistance for YBCO films on two inch diameter LaAlO3 substrates has been measured and found to be 0.62 milliohms with a uniformity of better than or - 5. On two inch diameter substrates, uniformity of thickness and room temperature resistivity of 7 have been achieved. The compositional uniformity of Y, Ba, and Cu across a two inch diameter substrate was found to be better than or - 1. Preliminary work on the growth of Y-ZrO2 dielectric layers and epitaxial YBCOPLZT bilayers has been initiated.
- Ceramics, Refractories and Glass
- Fabrication Metallurgy
- Electricity and Magnetism