Bimonthly Report on Work Done on Contract N00014-89-C-2238 during October and November 1991
MICRION CORP PEABODY MA
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Advanced column development is essentially complete as of December 1991. Several columns one of which is designated to go on the 00.25 um repair system are running and are being tested and used daily. They are used for high resolution imaging as well as milling and deposition of tungsten. Final items to be addressed are automated focus, stigmation, and alignment routiens. Algorithms have been written and will be tested this month. Edge analysis software was completed and tested. Preliminary data shows that day to day, the standard deviation or repeatability of the system is 0.01 um, although the mean of the standard deviation over several days is not as good. Sources of error in the edge shift may be due to the method of measurement discussed in the next paragraph, the inherent roughness of the gold grains leading to nonuniform sputtering, using the commercial ion column which has a larger beamspot size than the Micrion X-ray column, and internal redeposition.
- Atomic and Molecular Physics and Spectroscopy