Accession Number:

ADA243121

Title:

Investigation of Microwave Monolithic Integrated Circuit (MMIC) Non-Reciprocal Millimeterwave Components

Descriptive Note:

Final technical rept. Mar 1987-Jan 1990

Corporate Author:

WESTINGHOUSE SCIENCE AND TECHNOLOGY CENTER PITTSBURGH PA

Personal Author(s):

• Talisa, S. H.
• Krishnaswamy, S. V.
• Adam, J. D.
• Yoo, K. C.
• Doyle, N. J.

Report Date:

1991-09-01

Pagination or Media Count:

91.0

Abstract:

Two ferrite film deposition techniques were investigated in this program for possible use in the monolithic integration of Gallium Arsenide electronic and magnetic millimeter-wave devices 1 spin-spray plating SSP of nickel zinc ferrite films and 2 sputtering of barium hexaferrites with C-axis oriented normally to the film plane. The SSP technique potential for this application was demonstrated. Film structural characteristics were studied, as well as their adhesions to other substrates and the conditions for growth of thicker films. Multilayers totaling 25 microns in thickness were grown on semiconducting substrates. The SSP process occurs at about 100 C and was experimentally demonstrated not to damage Gallium arsenide MMIC devices. The magnetic characteristics of these films were comparable to ceramic materials. A scheme for the monolithic integration of magnetic and Gallium arsenide electronic devices was proposed and its feasibility experimentally demonstrated. The films showed higher dielectric loss than was desirable, possibly owing to high water content. A better drying technique is required. Barium ferrite films with C-axis texture were reproducibly grown on sapphire. Magnetic measurements yielded acceptable saturation magnetization and anisotropy field. Ferromagnetic resonance was not observed, possibly due to broad linewidths.

Descriptors:

• *MICROWAVE EQUIPMENT
• *INTEGRATED CIRCUITS
• *MONOLITHIC STRUCTURES(ELECTRONICS)
• STRUCTURAL PROPERTIES
• WATER
• GALLIUM ARSENIDES
• ADHESION
• DIELECTRICS
• FILMS
• ELECTRONIC EQUIPMENT
• SUBSTRATES
• SEMICONDUCTORS
• MOISTURE CONTENT
• SATURATION
• CERAMIC MATERIALS
• SAPPHIRE
• INTEGRATION
• NICKEL
• LOSSES
• MAGNETIZATION
• DRYING
• FERRITES
• FERROMAGNETIC RESONANCE
• BARIUM FERRITES
• MAGNETIC PROPERTIES
• ZINC COMPOUNDS
• MEASUREMENT
• THICKNESS

Subject Categories:

• Electrical and Electronic Equipment
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE