Accession Number:

ADA242834

Title:

Infrared Rotating Analyzer Ellipsometry: Calibration and Data Processing

Descriptive Note:

Technical rept.,

Corporate Author:

NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1991-11-01

Pagination or Media Count:

31.0

Abstract:

The necessary relationships and a calibration procedure is presented for a rotating analyzer infrared ellipsometer that uses wire grid polarizing optics. The wire grid polarizers contribute significant ellipticity due to relatively low extinction ratios. Jones matrices are used for the quarter-wave- plate, polarizer, sample, rotating analyzer ellipsometer configuration. Results from a calibrated infrared and visible light ellipsometer for silicon dioxide films on silicon are compared.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Infrared Detection and Detectors

Distribution Statement:

APPROVED FOR PUBLIC RELEASE