Infrared Rotating Analyzer Ellipsometry: Calibration and Data Processing
NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF CHEMISTRY
Pagination or Media Count:
The necessary relationships and a calibration procedure is presented for a rotating analyzer infrared ellipsometer that uses wire grid polarizing optics. The wire grid polarizers contribute significant ellipticity due to relatively low extinction ratios. Jones matrices are used for the quarter-wave- plate, polarizer, sample, rotating analyzer ellipsometer configuration. Results from a calibrated infrared and visible light ellipsometer for silicon dioxide films on silicon are compared.
- Test Facilities, Equipment and Methods
- Infrared Detection and Detectors