Accession Number:

ADA242832

Title:

An Oxygen Tracer Study of InP Oxidation

Descriptive Note:

Technical rept.,

Corporate Author:

NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1991-11-01

Pagination or Media Count:

19.0

Abstract:

The thermal oxidation process for InP results in a complex and process dependent oxide. From the observed self limiting behavior of the oxide growth, the rate limiting step is likely the diffusion of reaction species through the growing oxide film. O18 marker oxidation experiments with the resulting secondary ion mass spectroscopy SIMS depth profiles reveal that the oxidation takes place at the oxide surface by the outward migration of In and P, rather than at the oxide substrate interface. Based on the available results possible models for the oxidation are proposed.

Subject Categories:

  • Physical Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE